제품소개 > 반도체 및 디스플레이 검사/측정장비 > OLED용 측정기





Ellipsometer
 Spectral Range 245㎚~1000㎚, 470 wavelengths (Optional. 193㎚ ~ )
 Spot Size 300㎛ x 150㎛ (Optional 60㎛ x 30㎛)
 Measurement Range
   (Thickness)
1Å ~ 10㎛,
 Measurement Item Thickness, Reflective Index
Resistance Sheet
(Option)
 Measurement Range (4PP) 1mΩ/□ ~ 10MΩ/□
LCD C/F process

 Probe Tip Spacing

0.5mm, 1mm
(a choice between 0.5mm and 1mm)

CD Overlay
(Option)
 Repeatability (Max - Min)

< ±0.5um

Auto Focus
 IR Auto Focus / Laser Auto
   Focus

< 1sec

Type
 Glove Chamber