제품소개 > 반도체 및 디스플레이 검사/측정장비 > OLED용 측정기






 Detector (Camera) 8K Line Scan CCD
Pixel Size = 3.5um
F.O.V : 28mm
Scan Speed : 50~80mm/s
 Repair Laser Q-Switched / single shot 100Hz repetition
Wavelength : 1064 / 532 / 355nm (Tri-Lite)
Warm Up Time : < 15min
Energy Stability : ≤ 2.0% @ 1064nm, ≤ 2.5% @532nm, ≤3.5% @ 355nm
 Optical Lens
   Light Source
   Repeatability
   Inspection Items
2x Macro Lens
White/Blue LED Lamp
CV ≤ 5%, STD(3σ) ≤ 5
Defect Inspection (size ≥ 5um)
Mask Torsion Inspection
Stick Droop Inspection
Mask Flatness Inspection
Defect Review, Laser Repair, Drift Particle Removal