Á¦Ç°¼Ò°³ > ¹ÝµµÃ¼ ¹× µð½ºÇ÷¹ÀÌ °Ë»ç/ÃøÁ¤Àåºñ > ±âŸ ÃøÁ¤±â




   
 
 

SND´Â LCD Process »ó CVD, Dry Àü¿ë µÎ²² ÃøÁ¤À» ÃÖÀûÈ­ÇÑ SystemÀ¸·Î, »ó. ÇÏºÎ ÃøÁ¤¿ë Optic Head¸¦ ÅëÇÑ N+ Depth·®ÀÇ ½Ç½Ã°£ ÃøÁ¤ÀÌ °¡´ÉÇÕ´Ï´Ù. RobotÀ» ÀÌ¿ëÇϰųª ¼öµ¿À¸·Î Glass¸¦ 1¸Å¾¿ LoadingÇÏ¿© Transparent thin filmÀÇ µÎ²² ¹× N+ Depth·®, CD(¼±Æø)À» ºñ Á¢ÃË, ºñ ÆÄ±«ÀÇ ±¤ÇÐÀû ¹æ¹ýÀ¸·Î ÃøÁ¤ÇÕ´Ï´Ù.
»ç¿ë ¸ñÀû¿¡ µû¶ó Half Tone PR(RT PR) ÃøÁ¤À» ¿É¼ÇÀ¸·Î ¼±Åà ÇÒ ¼ö ÀÖÀ¸¸ç, CIM S/W ±â´É Áö¿øÀÌ °¡´ÉÇÏ¿© ¸Å ÃøÁ¤ °á°ú¸¦ Æí¸®ÇÏ°Ô Host¿¡ Àü¼Û ÇÒ ¼ö ÀÖ½À´Ï´Ù.



¡¡ÃøÁ¤¿ø¸® Reflectometry
¡¡½Ã½ºÅÛ ±¸¼º

Programmable automatic stage for »óºÎ µÎ²² ÃøÁ¤¿ë head moving: 1 set
Programmable automatic stage for ÇϺΠµÎ²² ÃøÁ¤¿ë head moving: 1 set
Programmable automatic stage for glass moving: 1 set
Work plate for glass loading : 1 set
Housing / cover: 1 set
Control unit: 1 set
Anti-vibration table: 1 set
Standard reference materials: 1 set

¡¡Æ¯Â¡

ºñ Á¢ÃË, ºñ ÆÄ±« °Ë»ç
N+ Depth ·® ½Ç½Ã°£ ÃøÁ¤, CD(Critical Dimension)(¼±Æø) ÃøÁ¤
3 Mask¿ë ½Ã·á µÎ²² ÃøÁ¤
Æí¸®ÇÑ µÎ²² ÃøÁ¤ °ü¸®
2°¡Áö µÎ²² °ü¸® Mode Áö¿ø(Operator mode / Engineer mode)
Glass scratch ¹æÁö¸¦ À§ÇÑ air blowing System
»ç¿ë¸ñÀû¿¡ µû¶ó Option Ãß°¡ °¡´É
Pattern matching ±â´É Áö¿ø
ÃÊÁ¤¹Ð, ÃÊ°í°¨µµ ÃøÁ¤±â±â

¡¡¿ëµµ

LCD Process »ó CVD, Dry Àü¿ë ±¤ÇÐ½Ä µÎ²² ÃøÁ¤
ºü¸¥ µÎ²² ÃøÁ¤ ¼Óµµ¿¡ µû¸¥ °øÁ¤ ¼öÀ² Çâ»ó



¡¡Stage size 370mm x 470mm ~
¡¡Measurement range 100¡Ê~35§­ (Depend on materials)
¡¡Spot size »óºÎ: 20§­, 10§­, 2§­, 0.15§­(Option)
ÇϺÎ: 2§­
¡¡Application areas LCD Process CVD, Dry
3 Mask, 4 Mask
¡¡Function All capabilities of ST6000
N+ Depth measurement
CD(Critical Dimension) measurement
Fine pattern measurement
Auto focusing
CCD Camera
Pattern recognition
CIM communication
¡¡Option Transmittance(Åõ°úÀ²) measurement
RI(Reflect Index)(±¼Àý·ü) measurement
Half Tone PR(RT PR) thickness measurement