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SND´Â LCD Process »ó CVD, Dry Àü¿ë µÎ²² ÃøÁ¤À» ÃÖÀûÈÇÑ SystemÀ¸·Î, »ó. ÇÏºÎ ÃøÁ¤¿ë Optic Head¸¦ ÅëÇÑ N+ Depth·®ÀÇ ½Ç½Ã°£ ÃøÁ¤ÀÌ °¡´ÉÇÕ´Ï´Ù. RobotÀ» ÀÌ¿ëÇϰųª ¼öµ¿À¸·Î Glass¸¦ 1¸Å¾¿ LoadingÇÏ¿© Transparent thin filmÀÇ µÎ²² ¹× N+ Depth·®, CD(¼±Æø)À» ºñ Á¢ÃË, ºñ ÆÄ±«ÀÇ ±¤ÇÐÀû ¹æ¹ýÀ¸·Î ÃøÁ¤ÇÕ´Ï´Ù.
»ç¿ë ¸ñÀû¿¡ µû¶ó Half Tone PR(RT PR) ÃøÁ¤À» ¿É¼ÇÀ¸·Î ¼±Åà ÇÒ ¼ö ÀÖÀ¸¸ç, CIM S/W ±â´É Áö¿øÀÌ °¡´ÉÇÏ¿© ¸Å ÃøÁ¤ °á°ú¸¦ Æí¸®ÇÏ°Ô Host¿¡ Àü¼Û ÇÒ ¼ö ÀÖ½À´Ï´Ù.
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¡¡ÃøÁ¤¿ø¸® |
Reflectometry |
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¡¡½Ã½ºÅÛ ±¸¼º |
Programmable automatic stage for »óºÎ µÎ²² ÃøÁ¤¿ë head moving: 1 set
Programmable automatic stage for ÇϺΠµÎ²² ÃøÁ¤¿ë head moving: 1 set
Programmable automatic stage for glass moving: 1 set
Work plate for glass loading : 1 set
Housing / cover: 1 set
Control unit: 1 set
Anti-vibration table: 1 set
Standard reference materials: 1 set
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¡¡Æ¯Â¡ |
ºñ Á¢ÃË, ºñ ÆÄ±« °Ë»ç
N+ Depth ·® ½Ç½Ã°£ ÃøÁ¤, CD(Critical Dimension)(¼±Æø) ÃøÁ¤
3 Mask¿ë ½Ã·á µÎ²² ÃøÁ¤
Æí¸®ÇÑ µÎ²² ÃøÁ¤ °ü¸®
2°¡Áö µÎ²² °ü¸® Mode Áö¿ø(Operator mode / Engineer mode)
Glass scratch ¹æÁö¸¦ À§ÇÑ air blowing System
»ç¿ë¸ñÀû¿¡ µû¶ó Option Ãß°¡ °¡´É
Pattern matching ±â´É Áö¿ø
ÃÊÁ¤¹Ð, ÃÊ°í°¨µµ ÃøÁ¤±â±â
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¡¡¿ëµµ |
LCD Process »ó CVD, Dry Àü¿ë ±¤ÇÐ½Ä µÎ²² ÃøÁ¤
ºü¸¥ µÎ²² ÃøÁ¤ ¼Óµµ¿¡ µû¸¥ °øÁ¤ ¼öÀ² Çâ»ó
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¡¡Stage size |
370mm x 470mm ~ |
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¡¡Measurement range |
100¡Ê~35§ (Depend on materials) |
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¡¡Spot size |
»óºÎ: 20§, 10§, 2§, 0.15§(Option)
ÇϺÎ: 2§ |
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¡¡Application areas |
LCD Process CVD, Dry
3 Mask, 4 Mask
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¡¡Function |
All capabilities of ST6000
N+ Depth measurement
CD(Critical Dimension) measurement
Fine pattern measurement
Auto focusing
CCD Camera
Pattern recognition
CIM communication |
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¡¡Option |
Transmittance(Åõ°úÀ²) measurement
RI(Reflect Index)(±¼Àý·ü) measurement
Half Tone PR(RT PR) thickness measurement |
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