 |
|
| Process |
BM/R/G/B/OC/PS Coater After Color Filter |
|
| Measurement Item |
Coater Mura(slit Mura, Thickness Mura)
Resist Particle Mura (Shell Mura)
Pin Mura
|
|
| Inspection Zone |
Element (X) approx : 610 ㎜
Element (Y) approx : 610 ㎜
|
|
| Resolution |
Element (X) approx : 300 ㎛
Scan (Y) approx : 300 ㎛
|
|
| Defect criterion |
Slit Mura : ≥1㎜, Pin Mura : ≥ø1㎜
|
|
| Defect Area |
1 ㎜ ( 1.0㎜ * 1.0㎜ ) |
|
