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 Process BM/R/G/B/OC/PS Coater After Color Filter
 Measurement Item Coater Mura(slit Mura, Thickness Mura)
Resist Particle Mura (Shell Mura)
Pin Mura
 Inspection Zone Element (X) approx : 610 ㎜
Element (Y) approx : 610 ㎜
 Resolution Element (X) approx : 300 ㎛
Scan (Y) approx : 300 ㎛
 Defect criterion Slit Mura : ≥1㎜, Pin Mura : ≥ø1㎜

 Defect Area 1 ㎜ ( 1.0㎜ * 1.0㎜ )