 |
|
¡¡Process |
BM/R/G/B/OC/PS Coater After Color Filter |
|
¡¡Measurement Item |
Coater Mura(slit Mura, Thickness Mura)
Resist Particle Mura (Shell Mura)
Pin Mura
|
|
¡¡Inspection Zone |
Element (X) approx : 610 §®
Element (Y) approx : 610 §®
|
|
¡¡Resolution |
Element (X) approx : 300 §
Scan (Y) approx : 300 §
|
|
¡¡Defect criterion |
Slit Mura : ¡Ã1§®, Pin Mura : ¡Ã©ª1§®
|
|
¡¡Defect Area |
1 §® ( 1.0§® * 1.0§® ) |
|