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¡¡Process BM/R/G/B/OC/PS Coater After Color Filter
¡¡Measurement Item Coater Mura(slit Mura, Thickness Mura)
Resist Particle Mura (Shell Mura)
Pin Mura
¡¡Inspection Zone Element (X) approx : 610 §®
Element (Y) approx : 610 §®
¡¡Resolution Element (X) approx : 300 §­
Scan (Y) approx : 300 §­
¡¡Defect criterion Slit Mura : ¡Ã1§®, Pin Mura : ¡Ã©ª1§®

¡¡Defect Area 1 §® ( 1.0§® * 1.0§® )