제품소개 > 반도체 및 디스플레이 검사/측정장비 > Options




 
 1. General Specification
 Principle Sub pixel Edge Detect Algorism
 Auto Focus Method Region Define Image Contrast Method
 CCD Camera

High Speed 640*480pixels, 256gray level, 200 fps

 Light source Tungsten-Halogen 100W (White)
 Measurement width range 0.8 ~ 80μm at 50x
4 ~ 400μm at 10x
8 ~ 800μm at 5x
 2. System explanation
  - Detected position teaching for optical system
  - Fully automatic & Semi - automatic CD measurement
 3. S/W UI
 



 1. General Specification
 Principle White-light Scanning interferometer
 Measuring Range Lateral Resolution: 0.7㎛
Vertical Resolution: 0.0001㎛
 2. Structure of Optic Part
 


 1. General Specification
 Principle Ohm's Law
 Measuring Range 1mΩ ~ 10MΩ (Normal)
10MΩ ~ 1GΩ (High)
 2. Principle Image
 



 1. General Specification
 Measurement Method Normal Drop-Shape Analyzing Method
(Young-Laplace,Trigonometric Method)
 Drop Control Automatic Pump by Computer Control
 Angle Range Automatic Pump by Computer Control
 Resolution ±2°
 2. Principle Image
 



 1. General Specification
 Usable Wavelength 420nm ~ 780nm (Option. 300nm ~ 1100nm)
 Wavelength Resolution 1.7nm
 Repeatability ± 0.3% at 550nm
 2. Principle Image
 



 1. General Specification
 Temperature Room Temperature
 Measurement Range 10Mpa ~ 3000Mpa
 2. Advantage
  - Non Contact Method
  - Fast Scan Speed
  - Stable reflection signal
 3. Principle