 |
|
|
| Spectral Ragne |
| Visible |
370㎚~1000㎚, 390 wavelengths |
|
| UV |
245㎚~1000㎚, 470 wavelengths |
|
| DUV |
193㎚~1000㎚, 500 wavelengths |
|
Spectral Resolution
Bandwidth |
1.5mm x 0.5mm
300㎛ x 150㎛
60㎛ x 30㎛
|
|
| Measurement Range |
1Å ~ 10㎛,
Max, 10 layers of multi-stack film structure
|
|
Refractive Index
Measurement
|
Repeatability : < 0.005 (1σ) |
|
| Thickness Measurement |
Repeatability : < 1Å (1σ) |
|
| Applications |
N,K / Thickness
Roughness / Interfacial
Mixing / Crystallinity
Anisotropy / Uniformity
Energy Band gap Etc.
|
|
| Extend (Possible Function) |
N2 Chamber combined
3D Interferometer combined
Vision Inspection combined
|
|
