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Spectral Ragne
Visible 370§¬~1000§¬, 390 wavelengths
UV 245§¬~1000§¬, 470 wavelengths
DUV 193§¬~1000§¬, 500 wavelengths
Spectral Resolution
Bandwidth
1.5mm x 0.5mm 300§­ x 150§­
60§­ x 30§­
Measurement Range 1¡Ê ~ 10§­,
Max, 10 layers of multi-stack film structure
Refractive Index
Measurement
Repeatability : < 0.005 (1¥ò)
Thickness Measurement Repeatability : < 1¡Ê (1¥ò)
Applications N,K / Thickness
Roughness / Interfacial
Mixing / Crystallinity
Anisotropy / Uniformity
Energy Band gap Etc.
Extend (Possible Function) N2 Chamber combined
3D Interferometer combined
Vision Inspection combined