제품소개 > 중소형 분석/측정장비 > 박막두께 측정기






Spectral Ragne
Visible 370㎚~1000㎚, 390 wavelengths
UV 245㎚~1000㎚, 470 wavelengths
DUV 193㎚~1000㎚, 500 wavelengths
Spectral Resolution
Bandwidth
1.5mm x 0.5mm 300㎛ x 150㎛
60㎛ x 30㎛
Measurement Range 1Å ~ 10㎛,
Max, 10 layers of multi-stack film structure
Refractive Index
Measurement
Repeatability : < 0.005 (1σ)
Thickness Measurement Repeatability : < 1Å (1σ)
Applications N,K / Thickness
Roughness / Interfacial
Mixing / Crystallinity
Anisotropy / Uniformity
Energy Band gap Etc.
Extend (Possible Function) N2 Chamber combined
3D Interferometer combined
Vision Inspection combined