 |
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Spectral Ragne |
Visible |
370§¬~1000§¬, 390 wavelengths |
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UV |
245§¬~1000§¬, 470 wavelengths |
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DUV |
193§¬~1000§¬, 500 wavelengths |
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Spectral Resolution Bandwidth |
1.5mm x 0.5mm
300§ x 150§
60§ x 30§
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Measurement Range |
1¡Ê ~ 10§,
Max, 10 layers of multi-stack film structure
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Refractive Index
Measurement
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Repeatability : < 0.005 (1¥ò) |
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Thickness Measurement |
Repeatability : < 1¡Ê (1¥ò) |
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Applications |
N,K / Thickness
Roughness / Interfacial
Mixing / Crystallinity
Anisotropy / Uniformity
Energy Band gap Etc.
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Extend (Possible Function) |
N2 Chamber combined
3D Interferometer combined
Vision Inspection combined
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