제품소개 > 중소형 분석/측정장비 > 기타 측정기






  Process BM/R/G/B/OC/PS Coater After Color Filter
  Measurement Item Coater Mura(slit Mura, Thickness Mura)
Resist Particle Mura (Shell Mura)
Pin Mura
  Inspection Zone Element (X) approx : 610 ㎜
Element (Y) approx : 610 ㎜
  Resolution Element (X) approx : 300 ㎛
Scan (Y) approx : 300 ㎛
  Defect criterion Slit Mura : ≥1㎜, Pin Mura : ≥ø1㎜
  Defect Area 1 ㎜ ( 1.0㎜ * 1.0㎜ )